Microstructure, mechanical and tribological properties of TiN-Ag films deposited by reactive magnetron sputtering

Abstract

Composite TiN-Ag films with various Ag content (Ag/(Ti + Ag)) were deposited using reactive magnetron sputtering and the influence of Ag content on the crystal structure, mechanical and tribological properties were investigated. The result showed that face-centered cubic (fcc) TiN and fcc-Ag co-existed in the films and TiN had a columnar-growth and the Ag nanoparticles embedded in the boundary of columnar crystal. The hardness of TiN-Ag films initially increased gradually and reached an optimum value, and then decreased with an increase in Ag content in the films. The maximum hardness value was 29 GPa at 0.8 at.% Ag. The addition of Ag into TiN film could enhance the fracture toughness (KIC) and critical load (LC1) of the films because the nanoparticle Ag provides a large volume fraction of grain boundaries. As Ag was added into TiN film, the average friction coefficient decreased from 0.78 at 0 at.% Ag to 0.20 at 41.1 at.% Ag; however, the wear rate of TiN-Ag films initially decreased and then increased, after reaching the minimum value of about 1.3 × 10−7 mm3/(mm.N), at 0.8 at.% Ag.