Cheng, B.; Chen, H.; Asempah, I.; Wang, J.; Zhu, Y.; Wan, J.; Qiao, Y.
(Coatings, 2022)
The barrier properties and diffusion behavior of Cu(Re) alloy films were studied. The films were deposited onto barrierless SiO2/Si by magnetron sputtering. X-ray diffraction patterns and electric resistivity results proved ...